Max. input voltage — low range

±5.5 V

Max. input voltage — high range

±16 V

Voltage resolution (input) — low range

3.2 nV

Voltage resolution (input) — high range

9.6 nV

Voltage accuracy (input) — low range

±50 µV ±5 ppm of reading

Voltage accuracy (input) — high range

±150 µV ±15 ppm of reading

DC current resolution

2 aA (32-bit)

DC current accuracy

±0.5% of reading ±0.2% of FS @ 300 mA…3 A ±0.05% of reading ±0.02% of FS @ 3 µA…300 mA ±0.5% of reading ±0.2% of FS @ 30 nA…3 µA ±0.5% of reading ±125 fA @ < 30 nA

Input impedance

> 10 TΩ, ±5 pF typ.

Input leakage current

< ±200 fA typ., < ±2 pA max.

Impedance range

10 µΩ to 100 GΩ

Max sampling rate

900 kHz at up to 2 channels, 3 MSps total

Common mode rejection

> 86 dB @ 10 µHz to 100 kHz > 66 dB @ 100 kHz to 8 MHz

Input channel phase-tracking acc.

±0.05° @ 10 µHz to 100 kHz ±0.125° @ 100 kHz to 8 MHz

Equivalent effective input noise

1 µV rms / 100 fA rms @ 1 mHz to 10 Hz

Controlled voltage — low range

±5 V

Controlled voltage — high range

±15 V

Voltage resolution (output) — low range

2.5 nV

Voltage resolution (output) — high range

7.5 nV

Accuracy voltage (output) — low range

±150 µV ±15 ppm of reading

Accuracy voltage (output) — high range

±450 µV ±45 ppm of reading

Integral nonlinearity — low range

typ. 2 ppm, max. 4 ppm

Integral nonlinearity — high range

typ. 6 ppm, max. 12 ppm

Compliance voltage — low range

±14 V

Compliance voltage — high range

±28 V

Bandwidth

DC to 10 MHz @ 33 Ω load

IR compensation

auto AC impedance technique, range 0 to 10 MΩ, resolution 0.012%

Small signal rise time

150 ns to 200 µs in 5 steps, automatic selection

Slew rate

15 MV/s

Controlled current

±3 A

Current range

±3 nA to ±3 A in 12 current ranges

Current resolution (galvanostatic)

32-bit ±0.2 ppb of FS

Current accuracy (galvanostatic)

±0.05% of reading ±0.02% of FS, ≥ 3 µA to 300 mA ±0.2% of reading ±0.1% of FS, < 3 µA or > 300 mA

EIS frequency range

10 µHz to 8 MHz

AC voltage amplitude

0 to 2 V, 24-bit resolution (low range) 0 to 6 V, 24-bit resolution (high range)

AC current amplitude

0 to 2 A, 24-bit resolution, in 12 current ranges

EIS amplitude accuracy

< 0.0025%

EIS amplitude resolution

0.0025%, 10,000 steps/decade

EIS Capability

Yes